ISSTT Proceedings

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Micromachined Waveguide Components For Submillimeter-Wave Applications

Authors:
K. Hui, W.L. Bishop, J.L. Hesler, D.S. Kurtz, T.W. Crowe
Abstract:
The high cost of fabricating waveguide components is one of the primary factors limiting the development of terahertz technology. This paper reviews the development of an inexpensive micromachining technology that is suitable for the frequency range from 500 GHz through 5 THz. Our first effort was a 585 GHz direct detector that allowed us to measure the beam patterns of our new micromachined horn antenna. The results were quite good and matched both theoretical predictions and the patterns of a low frequency scaled model of the horn. More recently, a high quality 585 GHz mixer was assembled and tested. The performance was equivalent to that obtained from a traditionally machined block, Tmix,dsb = 1,200K. We are now extending this technology to 1.6 THz. A sideband generator and a mixer circuit are being fabricated and the first circuits demonstrate excellent control of the critical features. This paper overviews the new micromachined block fabrication process, summarizes our measurements at 585 GHz and shows the first fabrication results at 1.6 THz.
Categories:
Micromachining
Year:
2000
Session:
6
Full-text:
Download a PDF of this paper.
Page Number(s):
269-274