ISSTT Proceedings

ISSTT Proceedings

You searched for:search icon

No Keywords
Showing 0 of items from your search. Start over 

Laser Micromachining Fabrication of THz Components

Authors:
C. Drouët d'Aubigny, C. Walker, B. Jones, C. Groppi, J. Papapolymerou, C. Tavernier
Abstract:
Laser micromachining techniques can be used to fabricate high-quality waveguide structures and quasi-optical components to micrometer accuracies. Successful GHz designs can be directly scaled to THz frequencies. We expect this promising technology to allow the construction of the first fully integrated THz heterodyne imaging arrays. At the University of Arizona, construction of the first laser micromachining system designed for THz waveguide components fabrication has been completed. Once tested and characterized our system will be used to construct prototype THz 1×4 focal plane mixer arrays, magic tees, AR coated silicon lenses, LO source phase gratings, filters and more. Our system can micro-machine structures down to a few microns accuracy and up to 6 inches across in a short time. This paper discusses the design and performance of our micromachining system, and illustrates the type, range and performance of components this exciting new technology will make accessible to the THz community.
Categories:
Miscellaneous
Year:
2001
Session:
12
Full-text:
Download a PDF of this paper.
Page Number(s):
514-525