ISSTT Proceedings

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Fabrication and Noise Measurement of NbTiN Hot Electron Bolometer Heterodyne Mixers at THz Frequencies

Authors:
P. Khosropanah, S. Bedorf, S. Cherednichenko, V. Drakinskiy, K. Jacobs, H. Merkel, E. Kollberg
Abstract:
The paper reports the latest development and the measured results of NbTiN hot electron 'Kilometer mixers at THz frequencies. The devices are based on 4-7 nm thin NbTiN films, which were deposited by reactive magnetron sputtering of NbTi target in an Ai/N 2 atmosphere, on heated high-resistivity Si substrates over a 20 inn thick MN buffer layer. The quality parameters of the film are transition temperature and normal-state resistivity, which were optimized by varying the sputtering parameters. The resistivity and the critical temperature of the films are about 400 µ[Omega]cm and 9 IC, respectively. Bolometers (4 µm wide and 0.7 µm long), integrated with logarithmic spiral antennas are fabricated. Mixer noise performance is tested in a quasi-optical receiver in 1.5-4 GHz IF band. The DSB receiver noise temperature of 700 K, 1 100 K and 3000 K is obtained at 0.7, 1.6 and 2.6 THz LO frequencies. respectively.
Categories:
HEB Mixers
Year:
2003
Session:
1
Full-text:
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Page Number(s):
20-30